Total depth after etching is 10.316 um
Calculated remaining resist as 7.72um, indicating an erosion of 1.03um in 10 minutes of etching
This equates to an erosion rate of 103 nm/min
The etch depth of 2.60um in 10 mins indicates an etch rate of 260.0nm/min
The selectivity is therefore 2.54:1